LEYBOLD CM330 Vacuum Pump Module
The LEYBOLD CM330 is a high-performance vacuum pump module engineered for critical industrial applications requiring precise pressure control. Designed for semiconductor manufacturing, thin-film coating processes, and laboratory equipment, it delivers reliable and efficient operation across diverse environmental conditions with exceptional stability.
Technical Specifications
| Brand | LEYBOLD |
| Model | CM330 |
| Vacuum Range | 0.1 – 10-6 mbar |
| Pumping Speed | 330 l/s |
| Drive Power | 3 kW |
| Power Supply | 380 V, 3-phase, 50/60 Hz |
| Operating Temperature | -10°C to +40°C |
| Noise Level | < 65 dB(A) |
| Certifications | CE, UL, ATEX |
Industrial Applications & Integration
This vacuum module excels in high-precision environments including cleanroom semiconductor fabrication, optical coating systems, and analytical instrumentation. Its robust construction withstands continuous operation in manufacturing plants while the integrated LCD interface provides real-time diagnostics. The CM330 integrates seamlessly with LEYBOLD’s vacuum system portfolio and is compatible with industrial networks including ControlNet (Coax). Typical companion equipment includes vacuum gauges, leak detectors, and automation controllers from the LEYBOLD product line.
Vertex Industrial Services
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